Konu "Al2O3" için Makale Koleksiyonu listeleme
Toplam kayıt 1, listelenen: 1-1
-
Electrical properties of Al/p-Si structure with Al2O3 thin film fabricated by atomic layer deposition system
(World Scientific Publishing Co. Pte Ltd, 2017)Al2O3 insulator layer was deposited by atomic layer deposition (ALD) technique on p-type Si ⟨111⟩ and the Al/Al2O3/p-Si metal/insulator/semiconductor (MIS) structures were fabricated. The current–voltage (I−V) characteristics ...