Atomik Tabaka Biriktirme Metodu ile Üretilen HfO2 Tabanlı Sensörlerin Hidrojen Gaz Algılama Özelliklerinin İncelenmesi

Basit Öğe Kaydı
dc.authoridYıldız, Dilber Esra / 0000-0003-2212-199X
dc.authoridAcar, Selim / 0000-0003-4014-7800
dc.authorwosidYıldız, Dilber Esra / AAB-6411-2020
dc.authorwosidAcar, Selim / ABI-4088-2020
dc.contributor.authorKaraduman, Irmak
dc.contributor.authorBarin, Özlem
dc.contributor.authorYıldız, Dilber Esra
dc.contributor.authorAcar, Selim
dc.date.accessioned2021-11-01T14:58:18Z
dc.date.available2021-11-01T14:58:18Z
dc.date.issued2016
dc.departmentHitit Üniversitesi, Fen Edebiyat Fakültesi, Fizik Bölümü
dc.description.abstractFossil fuels can very quickly be exhausted condition and thus leave harmful residues such as CO 2 environment clean and reliable use of the H-2 gas as the energy source of the future are expanded in various fields. In this case, the new research on the rapidly expanding field of applications and 112 gas sensor causes the increase. In this study, HfO2 thin films are grown on the p-Si by Atomic Layer Deposition (ALD) method and HfO2/p-Si thin film was produced. HfO2/p-Si structure is grown by Atomic Layer Deposition method and hydrogen gas sensing properties were investigated. Produced sample at different temperatures (30 degrees C-180 degrees C) and at different gas concentrations (1000ppm-4000ppm) as a function of time is investigated with measuring the electrical properties. Measurement results show that HfO2/p-Si thin films produced by ALD can be used as low temperatures hydrogen gas sensors.
dc.identifier.citationKaraduman, I., Barin, Ö., Yıldız, D. E., & Acar, S. (2016). Atomik Tabaka Biriktirme Metodu ile Üretilen HfO2 Tabanlı Sensörlerin Hidrojen Gaz Algılama Özelliklerinin İncelenmesi. Politeknik Dergisi, 19(3), 223-229.
dc.identifier.doi10.2339/2016.19.3.223-229
dc.identifier.endpage229en_US
dc.identifier.issn1302-0900
dc.identifier.issn2147-9429
dc.identifier.issue3en_US
dc.identifier.startpage223en_US
dc.identifier.urihttps://doi.org/10.2339/2016.19.3.223-229
dc.identifier.urihttps://hdl.handle.net/11491/6576
dc.identifier.volume19en_US
dc.identifier.wosWOS:000447835100003
dc.identifier.wosqualityN/A
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakTR-Dizin
dc.institutionauthorYıldız, Dilber Esra
dc.language.isotr
dc.publisherGazi Univ
dc.relation.ispartofJournal Of Polytechnic-Politeknik Dergisi
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectGas Sensoren_US
dc.subjectALDen_US
dc.subjectHydrogenen_US
dc.subjectGaz Sensören_US
dc.subjectALDen_US
dc.subjectHidrojenen_US
dc.titleAtomik Tabaka Biriktirme Metodu ile Üretilen HfO2 Tabanlı Sensörlerin Hidrojen Gaz Algılama Özelliklerinin İncelenmesi
dc.title.alternativeInvestigation of Hydrogen Gas Sensing Properties of HfO2 Based Sensor Produced By Atomic Layer Deposition Methoden_US
dc.typeArticle

Dosyalar

Orijinal paket
Listeleniyor 1 - 1 / 1
Küçük Resim
İsim:
ırmak-karaduman2016.pdf
Boyut:
1020.21 KB
Biçim:
Adobe Portable Document Format
Açıklama:
Tam Metin / Full Text
İndir

Koleksiyon

WoS İndeksli Yayınlar Koleksiyonu
Makale Koleksiyonu
TR-Dizin İndeksli Yayınlar Koleksiyonu